LPCVD cantilever boatCeramic vacuum suction cupMainly used for the preparation of thin films in the semiconductor photovoltaic industry. For example, the diffusion loader and unloader, the cantilever boat is a key component of the diffusion loader and is mainly used for loading and unloading silicon wafers before and after diffusion.
A cantilever boat or loading and unloading piece using a precision wear-resistant and high-temperature resistant ceramic structure The robot arm usually consists of 50 vacuum suction cups and can load and unload 50 silicon wafers at a time. The cantilever boat with ceramic structure has the advantages of no deformation, no pollution, and easy maintenance. The cantilever boat relies on the suction of the vacuum suction cup and the weight of the silicon wafer to load and unload silicon wafers in a soft landing manner, which can significantly reduce the fragmentation rate and accuracy requirements for the vehicle. The error of a single piece of vacuum suction cup can be controlled within 0.005mm, and the stacking error of 50 pieces does not exceed 0.2mm.
LPCVD quartz boat, diffusion quartz boat, and zirconia carrier boat are mainly used Preparation of thin films for the semiconductor photovoltaic industry. In the LPCVD (low pressure chemical vapor deposition) process, the quartz boat is the carrier of the silicon wafer in the reaction chamber.
Mingrui CeramicsProducedCeramic quartz boat tray and suction cup are used Precision wear-resistant and high-temperature-resistant zirconia ceramic materials are currently mainly divided into two types of pitches: 4.76 and 2.38. The zirconia quartz boat has high strength and is not easy to deform. It is pollution-free and is not easy to stick to the boat during the diffusion process. It is easier to maintain than ordinary quartz boats. Longer life
